Product introduction

High purity silicon tetrafluoride is one of the important electronic special gases in the electronic and semiconductor industries. It is mainly used as an etchant for tantalum silicide, silicon nitride, etc., a P-type dopant, and a silicon source for epitaxial deposition and diffusion. It can also be used to prepare electronic grade silane or polycrystalline silicon. 2. As silicon tetrafluoride can be hydrolyzed in a high temperature flame to produce heat sink SiO2 with high specific surface area, it can also be used to make high-purity quartz glass for optical fiber. 3. In optical fiber production technology, silicon tetrafluoride is an important component of the ion implantation method used to manufacture silicon based semiconductor devices. 4. Silicon tetrafluoride is also widely used in the production of cement, electronic materials, solar cell elements, photocopier drum, super large scale integrated circuit and other industries. 5. With the development of laser application in organic reaction, silicon tetrafluoride is also increasingly widely used in the photosensitizer industry. 6. The industrial production of silicon tetrafluoride is mainly in the United States and Japan, such as United Chemicals, Praxair and Air Products. 7. Japan's Central Nitrate Company, Showa Electric Chemical Company, Mitsui Chemical Company, etc. 8. With the rapid development of the semiconductor industry, the demand for silicon tetrafluoride is growing, and the requirements for its purity are also getting higher and higher. At present, China has begun to vigorously develop the preparation process of silicon tetrafluoride, but the purity and output are low, and high-purity silicon tetrafluoride products still rely on imports. Therefore, it is of great significance to break through the monopoly blockade of key technologies for the preparation of new semiconductor materials abroad, independently develop low-cost and high-yield silicon tetrafluoride preparation technology processes, realize domestic industrialized production, tackle key technology cores in an emergency, meet the market dependence on imports, improve the competitiveness of enterprises, and realize localization.

Product performance

1. Silicon tetrafluoride is a colorless, toxic and irritating odor gas at room temperature, which is soluble in ethanol, ether, nitric acid and hydrofluoric acid. It can produce dense smoke in humid air, and generate silicon oxide and hydrogen fluoride. 2. Silicon tetrafluoride can react violently with alkaline substances, and react with most materials containing water vapor to generate extremely flammable hydrogen. 3. High purity silicon tetrafluoride plays an important role in the electronic gas and semiconductor industry. Therefore, it is of great significance to speed up the promotion and application of silicon tetrafluoride gas to remove and purify impurities in silicon tetrafluoride gas. 4. The research contents of 5N (99.999%) high purity silicon tetrafluoride electronic special gas at home and abroad are mainly divided into two aspects: silicon tetrafluoride preparation technology and silicon tetrafluoride coarse material purification technology. 5. The purity and cleanliness of silicon tetrafluoride gas directly affect the quality, integration, specific technical indicators and yield of optoelectronic and microelectronic components, fundamentally restricting the accuracy and accuracy of circuits and devices. It is a "choke" technical product in the electronics and semiconductor industry that needs to be tackled urgently in China. 6. There are many methods to prepare silicon tetrafluoride for the preparation and application of silicon tetrafluoride gas at home and abroad, but each method has advantages and disadvantages. At present, high-purity silicon tetrafluoride products on the domestic market have the disadvantage of high total metal impurities content, which cannot meet the needs of semiconductor industry for electronic special gas. High quality silicon tetrafluoride products mainly rely on imports from the United States and Japan. High level and high quality silicon tetrafluoride products are developed according to market demand, To adapt to domestic demand and participate in international competition.